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該套系統(tǒng)成功地繼承了德***neaspec公司THz-neaSNOM的設(shè)計(jì)優(yōu)勢(shì)，采用保護(hù)的雙光路設(shè)計(jì)，完全可以實(shí)現(xiàn)真空環(huán)境下太赫茲波段應(yīng)用的樣品測(cè)量。HV-THz-neaSNOM在實(shí)現(xiàn)30nm高空間分辨率的同時(shí)，由于采用0.1-3THz波段的時(shí)域太赫茲光源（THZ-TDS），也可以實(shí)現(xiàn)近場(chǎng)太赫茲成像和圖譜的同時(shí)測(cè)量。這極大地滿足真空環(huán)境中太赫茲近場(chǎng)光學(xué)研究的需求，可以減少大氣中水對(duì)太赫茲波段的吸收影響，能更好地保持樣品的潔凈，為用戶進(jìn)***步集成真空設(shè)備提供了基礎(chǔ)。

太赫茲波有極強(qiáng)的穿透性，對(duì)不透明物體能完成透視成像，用來做半導(dǎo)體材料、生物樣品等的檢測(cè)是其應(yīng)用趨勢(shì)。該套真空太赫茲波段近場(chǎng)光學(xué)顯微系統(tǒng)（HV-THz-neaSNOM）的集成，將在生物應(yīng)用、半導(dǎo)體元器件和相變材料載流子等研究及領(lǐng)域都有著廣闊的應(yīng)用前景，有望為廣大太赫茲科研工作者提供更多實(shí)際研究工作中的便利和支持。

This system successfully inherits the design advantage of Germany＇s neaspec company thz-neasnom, ａnd adopts the patented dual optical path design, which can fully realize the sample measurement of terahertz band application in vacuum environment.Hv-thz-neasnom can realize high spatial resolution of 30nm ａnd simultaneous measurement of near-field terahertz imaging ａnd mapping due to the use of time-domain terahertz light source (thz-tds) at 0.1-3thz band.This greatly meets the demand of terahertz near-field optical research in vacuum environment, can reduce the absorption effect of water in atmosphere on terahertz band, can better keep the sample clean, ａnd provides a foundation for users to further integrate vacuum equipment.

Terahertz wave has a strong penetration, can complete the perspective imaging of opaque objects, used for the detection of semiconductor materials, biological samples is one of its application trends.The integration of the vacuum terahertz near-field optical microscopy system (hv-thz-neasnom) has broad application prospects in biological applications, semiconductor components ａnd phase change material carriers, ａnd is expected to provide more convenience ａnd support in practical research work for terahertz researchers.